Micro motion innovation

Here are a few of the innovations enabling our M3 micro-mechatronic motion systems including our linear microstages, rotary microstages and focus modules.

UTAF micro motor technology

The UTAF™ ultra-thin actuator family integrates all motor functions into a single piezoelectric ceramic beam only 4.5 X 0.82 X 0.7 mm.

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SQUIGGLE micro motor technology

The SQUIGGLE motor’s piezoelectric actuators vibrate a nut to drive a screw for smooth, precise motion in a 2.8 x 2.8 x 6 mm size.

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Reduced voltage SQUIGGLE RV micro motor technology

The SQUIGGLE RV micro motor employs state-of-the-art, multi-layer piezo technology to reduce the input voltage requirements to 3VDC.

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Custom SQUIGGLE motors

Custom piezo motor systems with higher push force, higher resolution and longer travel than our smallest SQL-RV-1.8 motors.

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TRACKER position sensor technology

This tiny Hall effect position sensor is used in our M3 modules. We developed the NSE-5310 in cooperation with ams.