Data Sheets
All documents on this webpage are subject to change without notice. Printed or downloaded copies are uncontrolled, and any new revision will supersede the previous datasheet.
M3 micro-mechatronic modules
M3-LS-U2-8 linear smart stage and developer’s kit data sheet
June 2024 (PDF)
M3-LS-3.4-15 linear smart stage and developer’s kit data sheet
May 2024 (PDF)
M3-LS-1.8 linear smart stage and developer’s kit data sheet
December 2024 (PDF)
M3-FS and M3-F focus module and developer’s kit data sheet
November 2022 (PDF)
M3-RS-U2-4.5-360 rotary smart stage and developer’s kit data sheet
May 2024 (PDF)
DK-M3-RS-U2-2M-20-L developer’s kit: two-axis two-mirror beam steering System
May 2024 (PDF)
M3-L linear module and developer’s kit data sheet
January 2023 (PDF)
SQUIGGLE motors and drivers
SQUIGGLE motors and drivers are integrated into M3 Modules and are not sold separately. The following tech bulletins are for information only.
SQL-RV-1.8 micro motor and drive system technical bulletin
SQL-1.8 SQUIGGLE micro motors and drive IC for OEM product development projects with New Scale.
December 2021 (238Kb PDF)
NSD-2101 piezo motor drive IC for SQL-RV-1.8 SQUIGGLE motors – ams (formerly austriamicrosystems) data sheet.
Rev 0.6 Aug. 2011 (486 Kb PDF).
Additional downloads
Please browse our application notes and articles and papers sections for additional downloadable files including customer case studies on micro motors, piezoelectric actuators, position sensors and encoders.
Download our terms & conditions.