Data Sheets

M3 micro-mechatronic modules

 M3-FS and M3-F focus module and developer’s kit data sheet 
April 2017
 (PDF)

 M3-LS-1.8 linear smart stage and developer’s kit data sheet
August 2017 (PDF)

 M3-LS-3.4-15 linear smart stage and developer’s kit data sheet
October 2017 (PDF)

M3-LS-U2-8 linear smart stage and developer’s kit data sheet
May 2022 – Preliminary (PDF)

 M3-L linear module and developer’s kit data sheet
January 2022 (PDF)

SQUIGGLE motors and drivers

SQUIGGLE motors and drivers are integrated into M3 Modules and are not sold separately. The following tech bulletins are for information only. 

 SQL-RV-1.8 micro motor and drive system technical bulletin
SQL-1.8 SQUIGGLE micro motors and drive IC for OEM product development projects with New Scale.
December 2021
(238Kb PDF)

 NSD-2101 piezo motor drive IC for SQL-RV-1.8 SQUIGGLE motors ams (formerly austriamicrosystems) data sheet.
Rev 0.6 Aug. 2011 (486 Kb PDF).

Additional downloads

Please browse our application notes and articles and papers sections for additional downloadable files including customer case studies on micro motors, piezoelectric actuators, position sensors and encoders.

Download our terms & conditions.