All-in-one USB micro stage has 0.5 μm resolution, 6 mm stroke and high lateral stability
The ultra-compact M3-LS-1.8 Linear Smart Stage is a miniature USB microstage with 0.5 µm resolution and absolute position encoding. It has less than 10 µm run-out and 1 millirad pitch and yaw over its full 6 mm travel range.
As with all M3 modules, the piezo micro motor and all drive electronics are completely integrated in the tiny stage housing, making system integration simple and fast.
Learn more
- M3-LS Linear Smart Stages
- The M3 micro-mechatronic module platform
- SQUIGGLE piezoelectric micro motor technology inside the stage
- Contact us regarding M3 module development for your application.