All-in-one USB micro stage has 0.5 μm resolution, 6 mm stroke and high lateral stability

The ultra-compact M3-LS-1.8 Linear Smart Stage is a miniature USB microstage with 0.5 µm resolution and absolute position encoding. It has less than 10 µm run-out and 1 millirad pitch and yaw over its full 6 mm travel range.

As with all M3 modules, the piezo micro motor and all drive electronics are completely integrated in the tiny stage housing, making system integration simple and fast.

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