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Vacuum-Compatible SQUIGGLE™ Motor Automates In-Vacuum Alignment Without Mechanical Feed-Throughs or Stepper Motors

Nanometer positioning for applications including semiconductor manufacturing and testing, scanning electron microscopes, ion beam microscopes, and scanning ion mass spectrometers

December 15, 2004 - Victor, NY - New Scale Technologies, Inc. announces a new vacuum-compatible version of its patent-pending SQUIGGLE motor for automating critical alignments in high-vacuum instruments. The model SQ-2000V has identical performance to the standard SQ-2000 but incorporates vacuum-compatible materials and design features.

Applications for vacuum-compatible SQUIGGLE motors include:

  • Scanning Electron Microscopes (SEM)
  • Focused Ion Beam Microscopes (FIB)
  • Scanning Ion Mass Spectrometers (SIMS)
  • Semiconductor manufacturing and testing
  • High energy particle accelerators, synchrotrons, and beamlines

The SQUIGGLE motor uses piezoelectric ceramic elements to create vibrations in a threaded nut which directly turns a mating screw. This unique design delivers twenty nanometer resolution and tens of millimeters of stroke with excellent speed and quiet operation. (See how they work for more information on the SQUIGGLE motor operating principle.)

“Our unique ceramic motor technology is ideal for automating instruments in vacuum, without mechanical feed-throughs or stepper motors,” said David Henderson, President of New Scale Technologies. “The vacuum-compatible SQUIGGLE motor offers very small size, nanometer precision, zero magnetic fields, and ultra-low outgassing and heating. It is a natural extension of the New Scale product line.”

The SQ-2000V products are compatible with vacuum pressures as low as 10-7 Torr. Vacuum electrical feed-throughs are available by special order.

About New Scale Technologies

New Scale Technologies makes miniature ceramic motors that enable our customers to create smaller products. Our patent-pending motors are bigger than MEMS devices but smaller than conventional motors. We generate precise movement using ultrasonic vibrations which makes our products powerful, simple, and compatible with extreme environments. Our SQUIGGLE motor uses piezoelectric actuators to vibrate a nut and directly rotate a mating screw in a tiny assembly with an order of magnitude fewer parts than conventional motors.

For more information please contact:

Fred Haas, Sales Manager, New Scale Technologies, Inc.
Phone 585-924-4450
Fax 585-924-4468
FHaas@newscaletech.com
www.newscaletech.com

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