Lab & Vacuum Motors
Piezo Motors for Research, Test and Manufacturing
The SQ-100 Series SQUIGGLE motor is a patented piezoelectric motor
for nanopositioning in the research lab, in semiconductor testing,
and in manufacturing.
The SQ-100NM is a non-magnetic motor.
The SQ-100V is vacuum motor operating to 10-7 Torr for
in-vacuum alignment without mechanical feed-throughs.
The SQ-100UHV is an ultrahigh vacuum motor operating to 10-10 Torr for
automated ultrahigh vacuum alignment without mechanical feed-throughs.
These miniature motors offer:
- Small size for tight spaces
- High resolution (20 nm)
- Long travel (to 50 mm)
- Fast, quiet and smooth motion
- Off-power position hold for multi-axis
“set and hold” positioning
- Vacuum and ultrahigh vacuum versions with ultra-low outgassing
and heating
- Non-magnetic version
You can use the SQ-100, SQ-100NM and SQ-100V to directly replace the manual micrometer in
many commercial linear stages (a light spring pre-load is required).
See also our ultra-thin motorized positioning stage
with integral piezo motor and encoder inside.
Lab and Vacuum Piezo Motor Specifications
Download
spec sheet with drawings - SQ-100, SQ-100NM and SQ-100V
Download spec sheet with drawings: SQ-100UHV
| |
SQ-100, SQ-100NM and SQ-100V Series |
SQ-100UHV Series |
| Housing Diameter |
12.3 mm max |
n/a |
| Housing Length |
36.6 mm |
n/a |
| Mounting Diameter |
9.5 mm |
12.45 mm |
| Shaft Diameter/Thread |
3/16 in x 100 threads/in
(4.76 mm x 0.25 mm lead) |
| Shaft Length and travel range |
See Ordering Information |
| Stall Force |
5 N |
| Speed Range |
0.001 to 2 mm/s |
0.001 to 1 mm/s |
| Resolution (typical) |
20 nm (without encoder) |
| Start/Stop Time |
0.2 ms |
| Off-Power Hold |
Yes (self-locking threads) |
| Operating Temperature |
-20 to 40°C |
| Bakeout temperature |
n/a |
150°C max |
Ordering Information
| Model1 |
Range of
motion2 |
Shaft length2 |
Vacuum
pressure3 |
SQ-115 and
SQ-115NM |
15 mm |
63 mm (2.54 in) |
n/a |
SQ-125 and
SQ-115NM |
25 mm |
77.6 mm (3.055 in) |
SQ-150 and
SQ-150NM |
50 mm |
103 mm (4.055 in) |
| SQ-115V |
15 mm |
63 mm (2.54 in) |
10-7 Torr) |
| SQ-125V |
25 mm |
77.6 mm (3.055 in) |
| SQ-150V |
50 mm |
103 mm (4.055 in) |
| SQ-108UHV-N |
8 mm |
28.6 mm (1.125 in) |
10-10Torr |
| SQ-115UHV-N |
15 mm |
38.1 mm (1.5 in) |
| SQ-125UHV-N |
25 mm |
47.6 mm (1.875 in) |
| SQ-150UHV-N |
50 mm |
73.0 mm (2.875 in) |
1SQUIGGLE motor model numbers are SQ-XYYA-B where X = series and YY = range of motion
A = environment option
.... V for Vacuum (10-7 Torr)
.... UHV
for ultrahigh vacuum (10-10 Torr)
.... NM for non-magnetic
B = housing option........... N for no housing
(See SQ-100-N data sheet)
2Custom shaft length and range of motion available on request.
3Vacuum feed-throughs not included.
Requirements: 3 wires, 30 gauge or greater, 200 V RMS.
Piezo Motor Drive Electronics
New Scale motor controllers are required to drive the SQ-100 series ultrasonic
motors. We offer benchtop controllers for laboratory use, and credit-card sized PCB drive cards for easy integration
into OEM systems and instruments.
